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Semiconductor Processing

10

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Physical Vapor Deposition (PVD)

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Deposits thin films through a physical process.

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Annealing

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Heating process that repairs damage to the silicon crystal lattice.

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Photolithography

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Used to transfer circuit patterns onto semiconductor wafers.

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Metallization

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Forms metal interconnects on the semiconductor.

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Planarization

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Flattens the wafer surface for subsequent layers.

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Chemical Vapor Deposition (CVD)

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Deposits thin films of material onto the semiconductor.

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Ion Implantation

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Dopes the semiconductor with impurities to change its electrical properties.

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Oxidation

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Grows a layer of silicon dioxide on the semiconductor surface.

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Etching

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Removes selected areas from the surface of the semiconductor.

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Dicing

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Slices the finished wafer into individual semiconductor devices.

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